|hAʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVƷλஔ(dng)ߣ_(d)99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95%
ҹ˾2000ʯӢƷa(chn)н(jng)λҪa(chn)ƷʯӢʯӢpʯӢʯӢʯӢˮʯӢƬʯӢh(hun)ʯӢʯӢxNʯӢܡʯӢʯӢܡoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ
ʯӢܰNҎ(gu)UV⾀ʯӢܼpʯӢֱ2-180mmں0.5-8mmL10-3000mmBʯӢܡÓuV⾀ܡoͨB۹SiO2_(d)99.6%ϣγߴW(xu)(wn)᷀(wn)׃ԺͿ܃(yu)W(xu)^_(d)93%Óuu10ppm(jng)^Óuu_(d)5ppmmڸ߉cuȵua(chn)Ʒ;֮¹ˇa(chn)Ʒıڰl(f)ӟܡh(yun)tܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴^253.7nmҲL⾀ǟo⾀ҪϣVڽеˮ̎ʳƷl(wi)Ț;
ʯӢƷʯӢʯӢݚʯӢʯӢˮסʯӢƬʯӢʯӢh(hun)ʯӢ塢ʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_p_A^ƽ^κ͔Usڡ߅ĥɰȼӹߜgԺüc,VʹˮO(sh)䡢ӟˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽë(x)ܣM(jn)ŚߜأԺҪJCJDH1-H7_߉cuȮa(chn)Ʒ;
ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿġȡ՚C\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ͳʯӢ⾀ϵÇ(ni)M(jn)g(sh)_l(f)®a(chn)ƷЧY(ji)(gu)·fLrܮa(chn)L253.7nmȏ⾀ݗ䏊100W/cm2,(x)ÓǺ(DNA)^Ɖ@ĚЧ,l(wi)g(sh)Ҏ(gu)ָ(bio)Ҫ
҂Įa(chn)Ʒ|(zh)_(d)(bio)˳Ҏ(gu)ҿԞ͑M(jn)ЁDϼӹ